Type: Error/Fault
Category: Beam3_RFSoC
Tags: 
Subject: HV1(192.168.0.25)電流limit
====== HV1(192.168.0.25)電流limit ======

HV1(192.168.0.25)が、HV100Vで0.999uA(limit)に達したため、DUT1(4col 30umは)98.39Vで運用